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Solar, Sensor and Backside LED Applications

SOLAR, SENSOR AND BACKSIDE LED APPLICATIONS

Some applications require backside illumination or spectral sensing of
a wafer while probing the top of the wafer. This requires 
a transparent chuck.
We use a 2 piece fused silica vacuum chuck, so that 
illumination
or sensing can be done from 250nm to 1800nm.

 

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