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Manual Probe Stations for Routine and Custom Applications

BU-4 PROBE STATION

Manual 4” probe station shown with 4” vacuum chuck 4′ x 4” roller bearing lead screw stage with fine theta control, magnetic stainless steel topped platen with lever quick lift and with options of Mitutoyo FS-70 probe station microscope on 3”x 4” Microscope translation stage. This is ideal for laser FA trimming with Mitutoyo long working distance objectives, while simultaneously probing.
A variety of cameras are available.



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BU-6 / BU-8 PROBE STATIONS

For probing 6” or 8” wafers with low profile lead screw driven stage, 6” or 8” chuck, with fine theta rotation, magnetic stainles steel topped platen with lever quick lift, and options of Mitutoyo or Motic prober microscope with 3”x 4” lead screw microscope movement, thermal chucks, cameras,
Mitutoyo LWD objectives and other accessories.

 

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BU-4 PROBE STATION

Shown with Meiji stereozoom microscope with 0.7x to 4.5x zoom and
90mm of working distance 
and LED ring light illuminator.
This is a lower cost microscope approach for those applications
that do not require magnifications higher than 100x.

 

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BU-8 PROBE STATION

With 8” chuck with fine theta rotation, 8”x8” lead screw movement stage, magnetic steel topped platen with quick lift and option of lower cost GX-6 microscope with long working distance objectives similar to Mitutoyo LWD objectives.

 

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BU8-17-FPF WIDE PLATEN

PROBE STATION

Our standard 8″ chuck probe station comes with a 14″ wide platen and a lever
action up/down quick lift platen mechanism. Our customer had an application
that required a 17″ wide platen with a precision fine feed lift. We created
the precision fine feed lift using a ball screw mechanism with a worn gear drive. Only
a few ounces of torque is required to lift the heavy platen with very fine resolution.
For the 8″ vacuum chuck with a 360 degree fine theta, we used a Ball Screw driven
precision cross roller bearing 8″ x 8″ stage. The platen has a magnetic stainless
steel top which is ideal for our BU-075 on/off magnetic base micropositioners.