For aerospace and a variety of applications it may be necessary to test devices or wafers under moderate to high vacuum conditions. The system in this picture was built for a high voltage – above 10KV, application, to prevent arcing. In this case we used ceramic probe holders and a Peltier cooled stage and a thermal InSb camera to see heat signatures in a SiC device under high voltage. These high vacuum systems were PC automated.

This is a compact low profile automated probe station, designed to drop into the high vacuum chamber shown. In this case to be used for laser trimming under vacuum.